1/13/2010	1:02:48 PM	Program started normally
1/13/2010	1:07:05 PM	Program started after a nonstandard shutdown
1/13/2010	1:09:12 PM	Program started after a nonstandard shutdown
1/13/2010	1:09:27 PM	Program exited cleanly
1/13/2010	1:20:33 PM	Program started normally
1/13/2010	1:20:53 PM	Program exited cleanly
1/13/2010	1:34:45 PM	Program started normally
1/13/2010	1:34:57 PM	Helium valve opened
1/13/2010	1:34:58 PM	Helium valve closed
1/13/2010	1:34:59 PM	Helium valve opened
1/13/2010	1:35:01 PM	Helium valve closed
1/13/2010	1:35:03 PM	Helium valve opened
1/13/2010	1:35:03 PM	Helium valve closed
1/13/2010	1:35:05 PM	Helium valve opened
1/13/2010	1:35:05 PM	Helium valve closed
1/13/2010	1:35:38 PM	Helium valve opened
1/13/2010	1:35:53 PM	Helium valve closed
1/13/2010	1:36:36 PM	Program started after a nonstandard shutdown
1/13/2010	1:36:39 PM	Helium valve opened
1/13/2010	1:36:47 PM	Helium valve closed
1/13/2010	1:36:55 PM	Helium valve opened
1/13/2010	1:36:56 PM	Helium valve closed
1/13/2010	1:37:06 PM	Program exited cleanly
1/13/2010	1:58:47 PM	Program started normally
1/13/2010	1:59:22 PM	Program exited cleanly
1/13/2010	2:11:04 PM	Program started normally
1/13/2010	2:12:52 PM	Helium valve closed
1/13/2010	2:12:52 PM	H2 valve closed
1/13/2010	2:12:52 PM	BCl3 valve closed
1/13/2010	2:12:52 PM	PH3 valve closed
1/13/2010	2:12:52 PM	SiCl4 pre valve closed
1/13/2010	2:12:52 PM	SiCl4 post valve closed
1/13/2010	2:12:52 PM	Main Vac valve opened
1/13/2010	2:12:52 PM	Bypass valve opened
1/13/2010	2:12:52 PM	Bubbler valve closed
1/13/2010	2:12:52 PM	Tube furnace set to 0
1/13/2010	2:12:57 PM	Bypass valve closed
1/13/2010	2:12:58 PM	Main Vac valve closed
1/13/2010	2:13:29 PM	Helium valve closed
1/13/2010	2:13:29 PM	H2 valve closed
1/13/2010	2:13:29 PM	BCl3 valve closed
1/13/2010	2:13:29 PM	PH3 valve closed
1/13/2010	2:13:29 PM	SiCl4 pre valve closed
1/13/2010	2:13:29 PM	SiCl4 post valve closed
1/13/2010	2:13:29 PM	Main Vac valve opened
1/13/2010	2:13:29 PM	Bypass valve opened
1/13/2010	2:13:29 PM	Bubbler valve closed
1/13/2010	2:13:29 PM	Tube furnace set to 0
1/13/2010	2:13:33 PM	Main Vac valve closed
1/13/2010	2:13:34 PM	Bypass valve closed
1/13/2010	2:14:10 PM	Program exited cleanly
1/13/2010	2:26:34 PM	Program started normally
1/13/2010	2:27:15 PM	Helium MFC set to  0.000000
1/13/2010	2:27:20 PM	Helium valve closed
1/13/2010	2:27:31 PM	Program started after a nonstandard shutdown
1/13/2010	2:27:32 PM	Main Vac valve opened
1/13/2010	2:27:35 PM	Bypass valve opened
1/13/2010	2:27:58 PM	Helium MFC set to  425.000000
1/13/2010	2:28:19 PM	Helium MFC set to  132.000000
1/13/2010	2:31:22 PM	Helium valve opened
1/13/2010	2:31:37 PM	Helium MFC set to  500.000000
1/13/2010	2:31:41 PM	Helium valve closed
1/13/2010	2:31:42 PM	Helium valve opened
1/13/2010	2:32:07 PM	Helium MFC set to  0.000000
1/13/2010	2:32:36 PM	Program started after a nonstandard shutdown
1/13/2010	2:32:38 PM	Main Vac valve opened
1/13/2010	2:32:39 PM	Bypass valve opened
1/13/2010	2:32:40 PM	Helium valve opened
1/13/2010	2:32:48 PM	Helium MFC set to  300.000000
1/13/2010	2:32:58 PM	Helium MFC set to  500.000000
1/13/2010	2:33:20 PM	Helium MFC set to  250.000000
1/13/2010	2:33:30 PM	Helium MFC set to  0.000000
1/13/2010	2:34:46 PM	Helium valve closed
1/13/2010	2:36:51 PM	Bypass solenoid MFC set to  500.000000
1/13/2010	2:37:07 PM	Main Vac valve closed
1/13/2010	2:37:09 PM	Helium valve opened
1/13/2010	2:37:14 PM	Helium MFC set to  500.000000
1/13/2010	2:37:32 PM	Bypass solenoid MFC set to  150.000000
1/13/2010	2:38:01 PM	Helium MFC set to  200.000000
1/13/2010	2:38:19 PM	Bypass solenoid MFC set to  760.000000
1/13/2010	2:40:55 PM	Helium MFC set to  0.000000
1/13/2010	2:41:03 PM	Bypass valve closed
1/13/2010	2:41:05 PM	Bypass valve opened
1/13/2010	2:41:06 PM	Helium valve closed
1/13/2010	2:41:30 PM	Helium valve closed
1/13/2010	2:41:30 PM	H2 valve closed
1/13/2010	2:41:30 PM	BCl3 valve closed
1/13/2010	2:41:30 PM	PH3 valve closed
1/13/2010	2:41:30 PM	SiCl4 pre valve closed
1/13/2010	2:41:30 PM	SiCl4 post valve closed
1/13/2010	2:41:30 PM	Main Vac valve opened
1/13/2010	2:41:30 PM	Bypass valve opened
1/13/2010	2:41:30 PM	Bubbler valve closed
1/13/2010	2:41:30 PM	Helium MFC set to  0.000000
1/13/2010	2:41:30 PM	H2 MFC set to  0.000000
1/13/2010	2:41:30 PM	BCl3 MFC set to  0.000000
1/13/2010	2:41:30 PM	PHl3 MFC set to  0.000000
1/13/2010	2:41:30 PM	SiCl4 MFC set to  0.000000
1/13/2010	2:41:30 PM	Bypass solenoid MFC set to  0.000000
1/13/2010	2:41:30 PM	Tube furnace set to 0
1/13/2010	2:41:30 PM	Bypass solenoid MFC set to  0.000000
1/13/2010	2:43:14 PM	Helium valve closed
1/13/2010	2:43:14 PM	H2 valve closed
1/13/2010	2:43:14 PM	BCl3 valve closed
1/13/2010	2:43:14 PM	PH3 valve closed
1/13/2010	2:43:14 PM	SiCl4 pre valve closed
1/13/2010	2:43:14 PM	SiCl4 post valve closed
1/13/2010	2:43:14 PM	Main Vac valve opened
1/13/2010	2:43:14 PM	Bypass valve opened
1/13/2010	2:43:14 PM	Bubbler valve closed
1/13/2010	2:43:14 PM	Helium MFC set to  0.000000
1/13/2010	2:43:14 PM	H2 MFC set to  0.000000
1/13/2010	2:43:14 PM	BCl3 MFC set to  0.000000
1/13/2010	2:43:14 PM	PHl3 MFC set to  0.000000
1/13/2010	2:43:14 PM	SiCl4 MFC set to  0.000000
1/13/2010	2:43:14 PM	Bypass solenoid MFC set to  0.000000
1/13/2010	2:43:14 PM	Tube furnace set to 0
1/13/2010	2:43:14 PM	Bypass solenoid MFC set to  0.000000
1/13/2010	2:43:15 PM	Helium valve closed
1/13/2010	2:43:15 PM	H2 valve closed
1/13/2010	2:43:15 PM	BCl3 valve closed
1/13/2010	2:43:15 PM	PH3 valve closed
1/13/2010	2:43:15 PM	SiCl4 pre valve closed
1/13/2010	2:43:15 PM	SiCl4 post valve closed
1/13/2010	2:43:15 PM	Main Vac valve opened
1/13/2010	2:43:15 PM	Bypass valve opened
1/13/2010	2:43:15 PM	Bubbler valve closed
1/13/2010	2:43:15 PM	Helium MFC set to  0.000000
1/13/2010	2:43:15 PM	H2 MFC set to  0.000000
1/13/2010	2:43:15 PM	BCl3 MFC set to  0.000000
1/13/2010	2:43:15 PM	PHl3 MFC set to  0.000000
1/13/2010	2:43:15 PM	SiCl4 MFC set to  0.000000
1/13/2010	2:43:15 PM	Bypass solenoid MFC set to  0.000000
1/13/2010	2:43:15 PM	Tube furnace set to 0
1/13/2010	2:43:15 PM	Bypass solenoid MFC set to  0.000000
1/13/2010	2:43:16 PM	Helium valve closed
1/13/2010	2:43:16 PM	H2 valve closed
1/13/2010	2:43:16 PM	BCl3 valve closed
1/13/2010	2:43:16 PM	PH3 valve closed
1/13/2010	2:43:16 PM	SiCl4 pre valve closed
1/13/2010	2:43:16 PM	SiCl4 post valve closed
1/13/2010	2:43:16 PM	Main Vac valve opened
1/13/2010	2:43:16 PM	Bypass valve opened
1/13/2010	2:43:16 PM	Bubbler valve closed
1/13/2010	2:43:16 PM	Helium MFC set to  0.000000
1/13/2010	2:43:16 PM	H2 MFC set to  0.000000
1/13/2010	2:43:16 PM	BCl3 MFC set to  0.000000
1/13/2010	2:43:16 PM	PHl3 MFC set to  0.000000
1/13/2010	2:43:16 PM	SiCl4 MFC set to  0.000000
1/13/2010	2:43:16 PM	Bypass solenoid MFC set to  0.000000
1/13/2010	2:43:16 PM	Tube furnace set to 0
1/13/2010	2:43:16 PM	Bypass solenoid MFC set to  0.000000
1/13/2010	2:45:39 PM	Program exited cleanly
1/13/2010	2:47:16 PM	Program started normally
1/13/2010	2:47:52 PM	Helium valve opened
1/13/2010	2:47:54 PM	Helium valve closed
1/13/2010	2:54:40 PM	Program exited cleanly
1/13/2010	2:55:12 PM	Program started normally
1/13/2010	2:55:38 PM	Helium valve opened
1/13/2010	2:55:43 PM	Helium MFC set to  200.000000
1/13/2010	2:55:47 PM	Bypass valve opened
1/13/2010	2:55:54 PM	Bypass solenoid MFC set to  500.000000
1/13/2010	2:56:10 PM	Bypass solenoid MFC set to  400.000000
1/13/2010	2:56:25 PM	Bypass solenoid MFC set to  700.000000
1/13/2010	2:56:51 PM	Helium MFC set to  400.000000
1/13/2010	2:56:55 PM	Bypass valve closed
1/13/2010	2:57:01 PM	Helium valve closed
1/13/2010	2:57:03 PM	Helium valve opened
1/13/2010	2:57:10 PM	Helium MFC set to  0.000000
1/13/2010	2:57:25 PM	Helium valve closed
1/13/2010	2:57:26 PM	Helium valve opened
1/13/2010	2:57:26 PM	Helium valve closed
1/13/2010	2:57:32 PM	Bypass solenoid MFC set to  760.000000
1/13/2010	2:57:33 PM	Bypass valve opened
1/13/2010	2:57:53 PM	Helium valve opened
1/13/2010	2:57:57 PM	Helium MFC set to  200.000000
1/13/2010	2:58:17 PM	Helium MFC set to  400.000000
1/13/2010	2:58:21 PM	Bypass solenoid MFC set to  700.000000
1/13/2010	2:58:25 PM	Helium valve closed
1/13/2010	2:58:26 PM	Bypass valve closed
1/13/2010	2:58:35 PM	Program exited cleanly
1/13/2010	3:01:24 PM	Program started normally
1/13/2010	3:01:29 PM	Bypass valve opened
1/13/2010	3:01:30 PM	Main Vac valve opened
1/13/2010	3:01:31 PM	Main Vac valve closed
1/13/2010	3:01:31 PM	Main Vac valve opened
1/13/2010	3:01:34 PM	Helium valve opened
1/13/2010	3:01:55 PM	Helium valve closed
1/13/2010	3:02:00 PM	Bypass valve closed
1/13/2010	3:02:05 PM	Main Vac valve closed
1/13/2010	3:02:06 PM	Main Vac valve opened
1/13/2010	3:02:19 PM	Bypass valve opened
1/13/2010	3:02:20 PM	Bypass solenoid MFC set to  744.000000
1/13/2010	3:02:21 PM	Main Vac valve closed
1/13/2010	3:02:24 PM	Helium valve opened
1/13/2010	3:02:30 PM	Helium MFC set to  0.000000
1/13/2010	3:02:30 PM	Helium valve closed
1/13/2010	3:02:31 PM	Main Vac valve opened
1/13/2010	3:02:32 PM	Main Vac valve closed
1/13/2010	3:02:47 PM	Helium valve opened
1/13/2010	3:06:52 PM	Program started after a nonstandard shutdown
1/13/2010	3:06:53 PM	Main Vac valve opened
1/13/2010	3:06:55 PM	Bypass valve opened
1/13/2010	3:06:56 PM	Main Vac valve closed
1/13/2010	3:06:59 PM	Bypass solenoid MFC set to  744.000000
1/13/2010	3:07:00 PM	Helium valve opened
1/13/2010	3:07:02 PM	Helium valve closed
1/13/2010	3:07:03 PM	Helium valve opened
1/13/2010	3:07:09 PM	Helium MFC set to  500.000000
1/13/2010	3:08:41 PM	Helium MFC set to  0.000000
1/13/2010	3:08:41 PM	Helium valve closed
1/13/2010	3:08:54 PM	Bypass valve closed
1/13/2010	3:34:09 PM	Bypass solenoid MFC set to  0.000000
1/13/2010	3:34:12 PM	Bypass valve opened
1/13/2010	3:34:46 PM	Main Vac valve opened
1/13/2010	3:38:37 PM	Main Vac valve closed
1/13/2010	3:38:38 PM	Bypass valve closed
1/13/2010	3:39:00 PM	Bypass valve opened
1/13/2010	3:39:01 PM	Main Vac valve opened
1/13/2010	3:40:41 PM	Main Vac valve closed
1/13/2010	3:40:44 PM	Main Vac valve opened
1/13/2010	3:40:48 PM	Helium valve opened
1/13/2010	3:40:55 PM	Helium MFC set to  500.000000
1/13/2010	3:45:13 PM	Helium MFC set to  0.000000
1/13/2010	3:45:16 PM	Helium valve closed
1/13/2010	3:46:20 PM	Main Vac valve closed
1/13/2010	3:46:20 PM	Bypass valve closed
1/13/2010	3:46:33 PM	Bypass valve opened
1/13/2010	3:46:33 PM	Main Vac valve opened
1/13/2010	3:47:57 PM	Main Vac valve closed
1/13/2010	3:48:04 PM	Bypass solenoid MFC set to  760.000000
1/13/2010	3:48:12 PM	H2 valve opened
1/13/2010	3:48:18 PM	H2 MFC set to  500.000000
1/13/2010	3:48:48 PM	H2 MFC set to  495.000000
1/13/2010	3:50:53 PM	Bypass valve closed
1/13/2010	3:51:00 PM	Bubbler valve opened
1/13/2010	4:14:00 PM	SiCl4 MFC set to  325.000000
1/13/2010	4:14:02 PM	SiCl4 pre valve opened
1/13/2010	4:14:04 PM	SiCl4 post valve opened
1/13/2010	4:15:19 PM	SiCl4 MFC set to  0.000000
1/13/2010	4:15:20 PM	SiCl4 pre valve closed
1/13/2010	4:15:20 PM	SiCl4 post valve closed
1/13/2010	4:18:27 PM	BCl3 valve opened
1/13/2010	4:18:33 PM	BCl3 MFC set to  2.000000
1/13/2010	4:18:55 PM	BCl3 MFC set to  0.000000
1/13/2010	4:18:56 PM	BCl3 valve closed
1/13/2010	4:19:36 PM	SiCl4 MFC set to  20.000000
1/13/2010	4:19:37 PM	SiCl4 pre valve opened
1/13/2010	4:19:38 PM	SiCl4 post valve opened
1/13/2010	4:20:03 PM	SiCl4 MFC set to  40.000000
1/13/2010	4:20:17 PM	SiCl4 MFC set to  80.000000
1/13/2010	4:20:35 PM	SiCl4 MFC set to  90.000000
1/13/2010	4:20:47 PM	SiCl4 MFC set to  70.000000
1/13/2010	4:21:05 PM	SiCl4 MFC set to  20.000000
1/13/2010	4:21:16 PM	SiCl4 MFC set to  150.000000
1/13/2010	4:21:27 PM	SiCl4 MFC set to  100.000000
1/13/2010	4:21:41 PM	SiCl4 MFC set to  10.000000
1/13/2010	4:21:53 PM	SiCl4 MFC set to  0.000000
1/13/2010	4:21:55 PM	SiCl4 pre valve closed
1/13/2010	4:21:56 PM	SiCl4 post valve closed
1/13/2010	4:22:13 PM	SiCl4 MFC set to  10.000000
1/13/2010	4:22:14 PM	SiCl4 pre valve opened
1/13/2010	4:22:15 PM	SiCl4 post valve opened
1/13/2010	4:22:39 PM	SiCl4 MFC set to  50.000000
1/13/2010	4:22:57 PM	SiCl4 MFC set to  0.000000
1/13/2010	4:22:57 PM	SiCl4 pre valve closed
1/13/2010	4:22:58 PM	SiCl4 post valve closed
1/13/2010	4:23:40 PM	SiCl4 MFC set to  20.000000
1/13/2010	4:23:41 PM	SiCl4 pre valve opened
1/13/2010	4:23:42 PM	SiCl4 post valve opened
1/13/2010	4:24:24 PM	SiCl4 MFC set to  25.000000
1/13/2010	4:24:59 PM	SiCl4 MFC set to  0.000000
1/13/2010	4:25:02 PM	SiCl4 MFC set to  25.000000
1/13/2010	4:25:40 PM	SiCl4 MFC set to  0.000000
1/13/2010	4:25:41 PM	SiCl4 pre valve closed
1/13/2010	4:25:41 PM	SiCl4 post valve closed
1/13/2010	4:26:45 PM	SiCl4 pre valve opened
1/13/2010	4:26:46 PM	SiCl4 post valve opened
1/13/2010	4:30:24 PM	SiCl4 pre valve closed
1/13/2010	4:30:25 PM	SiCl4 post valve closed
1/13/2010	4:34:36 PM	Bubbler valve closed
1/13/2010	4:34:42 PM	H2 MFC set to  0.000000
1/13/2010	4:34:43 PM	H2 valve closed
1/13/2010	4:34:45 PM	Bypass valve opened
1/13/2010	4:36:59 PM	Program started after a nonstandard shutdown
1/13/2010	4:37:00 PM	Bypass valve opened
1/13/2010	4:37:02 PM	Bypass solenoid MFC set to  760.000000
1/13/2010	4:43:10 PM	H2 MFC set to  52.100000
1/13/2010	4:45:00 PM	H2 MFC set to  423.200000
1/13/2010	4:45:16 PM	H2 MFC set to  500.000000
1/13/2010	4:45:48 PM	H2 MFC set to  0.000000
1/13/2010	4:46:13 PM	H2 MFC set to  50.000000
1/13/2010	4:47:12 PM	H2 MFC set to  0.000000
1/13/2010	4:49:15 PM	Helium MFC set to  100.000000
1/13/2010	4:50:21 PM	Helium MFC set to  0.000000
1/13/2010	4:51:12 PM	Helium MFC set to  100.000000
1/13/2010	4:53:15 PM	BCl3 MFC set to  1.000000
1/13/2010	4:53:28 PM	BCl3 MFC set to  2.000000
1/13/2010	4:54:02 PM	BCl3 MFC set to  0.000000
1/13/2010	4:54:28 PM	Helium MFC set to  0.000000
1/13/2010	6:02:15 PM	Bypass solenoid MFC set to  0.000000
1/13/2010	6:02:37 PM	Bypass solenoid MFC set to  760.000000
1/13/2010	6:02:41 PM	Helium valve opened
1/13/2010	6:02:49 PM	Helium MFC set to  500.000000
1/13/2010	6:03:38 PM	Helium MFC set to  0.000000
1/13/2010	6:03:43 PM	Helium valve closed
1/13/2010	6:05:41 PM	Bypass solenoid MFC set to  0.000000
1/13/2010	6:06:16 PM	Main Vac valve opened
1/13/2010	6:07:11 PM	Helium MFC set to  100.000000
1/13/2010	6:07:26 PM	Helium MFC set to  200.000000
1/13/2010	6:07:31 PM	Helium MFC set to  0.000000
1/13/2010	6:07:40 PM	H2 MFC set to  500.000000
1/13/2010	6:07:52 PM	Helium MFC set to  500.000000
1/13/2010	6:08:13 PM	BCl3 MFC set to  5.000000
1/13/2010	6:08:23 PM	PHl3 MFC set to  0.000000
1/13/2010	6:08:28 PM	SiCl4 MFC set to  100.000000
1/13/2010	6:08:32 PM	SiCl4 MFC set to  500.000000
1/13/2010	6:08:56 PM	SiCl4 MFC set to  500.000000
1/13/2010	6:09:25 PM	Helium MFC set to  500.000000
1/13/2010	7:33:06 PM	Program exited cleanly
1/13/2010	7:33:49 PM	Program started normally
1/13/2010	7:33:51 PM	Main Vac valve opened
1/13/2010	7:33:51 PM	Bypass valve opened
1/13/2010	7:33:53 PM	Bypass valve closed
1/13/2010	7:33:54 PM	Bypass valve opened
1/13/2010	7:34:13 PM	Helium MFC set to  0.000000
1/13/2010	7:34:17 PM	BCl3 MFC set to  0.000000
1/13/2010	7:34:20 PM	Program exited cleanly
1/13/2010	8:09:21 PM	Program started normally
1/13/2010	8:09:30 PM	Program exited cleanly
1/13/2010	8:09:38 PM	Program started normally
1/13/2010	8:10:06 PM	BCl3 MFC set to  0.000000
1/13/2010	8:10:07 PM	H2 MFC set to  0.000000
1/13/2010	8:10:18 PM	H2 valve opened
1/13/2010	8:10:19 PM	H2 valve closed
1/13/2010	8:10:22 PM	BCl3 valve opened
1/13/2010	8:10:23 PM	BCl3 valve closed
1/13/2010	8:10:28 PM	SiCl4 pre valve opened
1/13/2010	8:10:29 PM	SiCl4 pre valve closed
1/13/2010	8:11:28 PM	SiCl4 pre valve opened
1/13/2010	8:11:31 PM	SiCl4 pre valve closed
1/13/2010	8:11:37 PM	SiCl4 post valve opened
1/13/2010	8:11:37 PM	SiCl4 post valve closed
1/13/2010	8:11:49 PM	Program exited cleanly
1/13/2010	8:12:25 PM	Program started normally
1/13/2010	8:12:26 PM	SiCl4 pre valve opened
1/13/2010	8:12:27 PM	SiCl4 pre valve closed
1/13/2010	8:12:33 PM	SiCl4 post valve opened
1/13/2010	8:12:34 PM	SiCl4 post valve closed
1/13/2010	8:12:51 PM	Program exited cleanly
